Tecnologia em Metalurgia, Materiais e Mineração
https://tecnologiammm.com.br/article/doi/10.4322/tmm.2011.027
Tecnologia em Metalurgia, Materiais e Mineração
Artigo Original

SÍNTESE E CARACTERIZAÇÃO DE FILMES FINOS DE ZrN DEPOSITADOS EM DIFERENTES TEMPERATURAS

SYNTESIS AND CHARACTERIZATION OF ZrN THIN FILMS DEPOSITED AT DIFFERENT TEMPERATURES

Roman, Daiane; Bernardi, Juliane; Amorim, Cintia Lugnani G. de; Figueroa, Carlos Alejandro; Baumvol, Israel Jacob R.; Basso, Rodrigo Leonardo de O.

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Resumo

Filmes finos nanométricos de nitreto de zircônio (ZrN) foram depositados sobre diferentes substratos, objetivando-se estudar a microestrutura cristalina da superfície e investigar o comportamento eletroquímico para obter a melhor composição que minimize reações de corrosão. Os revestimentos foram produzidos por deposição física de vapor (PVD). É estudada a influência da pressão parcial do gás nitrogênio, do tempo e da temperatura de deposição, nas propriedades da superfície. Os filmes de ZrN foram caracterizados pelas técnicas de espectrometria por espalhamento Rutherford (RBS), espectroscopia por fotoelétrons de raios X (XPS), difração de raios X (XRD) e ensaios de corrosão. Como esperado, as propriedades dos filmes finos de ZrN e as microestruturas variam com os parâmetros de deposição. Quanto maior a temperatura usada na deposição dos filmes maior a resistência contra a corrosão. Quando depositado sobre o titânio, os ensaios de corrosão mostram que os revestimentos de ZrN depositados por PVD pode efetivamente melhorar a resistência contra a corrosão.

Palavras-chave

Nitreto de zircônio, Revestimento PVD, Corrosão

Abstract

Zirconium nitride (ZrN) nanometric films were deposited onto different substrates, in order to study the surface crystalline microstructure and also to investigate the electrochemical behavior to obtain a better composition that minimizes corrosion reactions. The coatings were produced by physical vapor deposition (PVD). The influence of the nitrogen partial pressure, deposition time and temperature over the surface properties is studied. Rutherford backscattering spectrometry (RBS), X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM) techniques and corrosion experiments were performed to characterize the ZrN hard coatings. As expected, the ZrN films properties and microstructure changes according to the deposition parameters. The corrosion resistance increases with the temperature used in the films deposition. Corrosion tests show that ZrN coatings deposited by PVD onto titanium substrate can improve the corrosion resistance.

Keywords

Zirconium nitride, PVD hard coating, Corrosion

Referências

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